Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9840777 | Apparatus for radical-based deposition of dielectric films | Jianhua Zhou, Yihong Chen, Abhijit Basu Mallick, Oscar Lopez, Ningli Liu | 2017-12-12 |
| 9816187 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2017-11-14 |
| 9725806 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Ramprakash Sankarakrishnan | 2017-08-08 |
| 9593419 | Wafer rotation in a semiconductor chamber | Ganesh Balasubramanian, Ramprakash Sankarakrishnan, Robert W. Kim, Dale R. Du Bois, Kirby H. Floyd +2 more | 2017-03-14 |
| 9556507 | Yttria-based material coated chemical vapor deposition chamber heater | Ren-Guan Duan, Jianhua Zhou | 2017-01-31 |