Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9725806 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2017-08-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9725806 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2017-08-08 |