Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9725806 | Multi-zone pedestal for plasma processing | Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2017-08-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9725806 | Multi-zone pedestal for plasma processing | Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2017-08-08 |