Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9593419 | Wafer rotation in a semiconductor chamber | Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Robert W. Kim, Kirby H. Floyd +2 more | 2017-03-14 |