Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9597734 | Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof | Jennifer Y. Sun, Sumanth Banda | 2017-03-21 |
| 9556507 | Yttria-based material coated chemical vapor deposition chamber heater | Juan Carlos Rocha-Alvarez, Jianhua Zhou | 2017-01-31 |