| 9850568 |
Plasma erosion resistant rare-earth oxide based thin film coatings |
Biraja P. Kanungo, Vahid Firouzdor, Tom K. Cho |
2017-12-26 |
| 9850591 |
High purity aluminum top coat on substrate |
Sumanth Banda |
2017-12-26 |
| 9850573 |
Non-line of sight deposition of erbium based plasma resistant ceramic coating |
— |
2017-12-26 |
| 9850161 |
Fluoride glazes from fluorine ion treatment |
Chengtsin Lee |
2017-12-26 |
| 9812341 |
Rare-earth oxide based coatings based on ion assisted deposition |
Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang |
2017-11-07 |
| 9797037 |
Ion beam sputtering with ion assisted deposition for coatings on chamber components |
Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang |
2017-10-24 |
| 9725799 |
Ion beam sputtering with ion assisted deposition for coatings on chamber components |
Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang |
2017-08-08 |
| 9708713 |
Aerosol deposition coating for semiconductor chamber components |
Biraja P. Kanungo, Tom K. Cho, Ying Zhang |
2017-07-18 |
| 9711334 |
Ion assisted deposition for rare-earth oxide based thin film coatings on process rings |
Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang |
2017-07-18 |
| 9687953 |
Chamber components with polished internal apertures |
Vahid Firouzdor, David Koonce, Biraja P. Kanungo |
2017-06-27 |
| 9663870 |
High purity metallic top coat for semiconductor manufacturing components |
Vahid Firouzdor |
2017-05-30 |
| 9624593 |
Anodization architecture for electro-plate adhesion |
Biraja P. Kanungo |
2017-04-18 |
| 9617188 |
Rare-earth oxide based coating |
Biraja P. Kanungo |
2017-04-11 |
| 9610591 |
Showerhead having a detachable gas distribution plate |
Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more |
2017-04-04 |
| 9604249 |
Innovative top-coat approach for advanced device on-wafer particle performance |
Biraja P. Kanungo, Dmitry Lubomirsky, Vahid Fioruzdor |
2017-03-28 |
| 9597734 |
Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof |
Sumanth Banda, Ren-Guan Duan |
2017-03-21 |
| 9583369 |
Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles |
Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang |
2017-02-28 |
