Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9610591 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2017-04-04 |
| 9536710 | Tunable gas delivery assembly with internal diffuser and angular injection | Kyle Tantiwong, Samer Banna, Waheb Bishara | 2017-01-03 |