Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666466 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason C. Della Rosa, Brad L. Mays, Douglas A. Buchberger, Jr. | 2017-05-30 |
| 9639097 | Component temperature control by coolant flow control and heater duty cycle control | Chetan Mahadeswaraswamy, Kartik Ramaswamy, Bryan Liao, Sergio Fukuda Shoji, Duy D. Nguyen +1 more | 2017-05-02 |
| 9610591 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2017-04-04 |
| 9540731 | Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads | James D. Carducci | 2017-01-10 |