| 9824862 |
Symmetric VHF source for a plasma reactor |
Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, Kenneth S. Collins, Shahid Rauf +3 more |
2017-11-21 |
| 9799491 |
Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching |
Leonid Dorf, Kenneth S. Collins, Shahid Rauf, Kartik Ramaswamy, Hamid Tavassoli +2 more |
2017-10-24 |
| 9745663 |
Symmetrical inductively coupled plasma source with symmetrical flow chamber |
Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Douglas A. Buchberger, Jr. +5 more |
2017-08-29 |
| 9741546 |
Symmetric plasma process chamber |
Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2017-08-22 |
| 9721760 |
Electron beam plasma source with reduced metal contamination |
Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Kartik Ramaswamy, Nipun Misra +2 more |
2017-08-01 |
| 9653267 |
Temperature controlled chamber liner |
Kallol Bera, Nipun Misra, Larry D. Elizaga |
2017-05-16 |
| 9570275 |
Heated showerhead assembly |
Olga Regelman, Kallol Bera, Douglas A. Buchberger, Jr., Paul Brillhart |
2017-02-14 |
| 9540731 |
Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads |
Hamid Noorbakhsh |
2017-01-10 |
