Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824862 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, Kenneth S. Collins, Shahid Rauf +3 more | 2017-11-21 |
| 9799491 | Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching | Leonid Dorf, Kenneth S. Collins, Shahid Rauf, Kartik Ramaswamy, Hamid Tavassoli +2 more | 2017-10-24 |
| 9745663 | Symmetrical inductively coupled plasma source with symmetrical flow chamber | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Douglas A. Buchberger, Jr. +5 more | 2017-08-29 |
| 9741546 | Symmetric plasma process chamber | Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2017-08-22 |
| 9721760 | Electron beam plasma source with reduced metal contamination | Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Kartik Ramaswamy, Nipun Misra +2 more | 2017-08-01 |
| 9653267 | Temperature controlled chamber liner | Kallol Bera, Nipun Misra, Larry D. Elizaga | 2017-05-16 |
| 9570275 | Heated showerhead assembly | Olga Regelman, Kallol Bera, Douglas A. Buchberger, Jr., Paul Brillhart | 2017-02-14 |
| 9540731 | Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads | Hamid Noorbakhsh | 2017-01-10 |