Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799491 | Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching | Leonid Dorf, Kenneth S. Collins, Shahid Rauf, Kartik Ramaswamy, James D. Carducci +2 more | 2017-10-24 |
| 9570275 | Heated showerhead assembly | James D. Carducci, Kallol Bera, Douglas A. Buchberger, Jr., Paul Brillhart | 2017-02-14 |