Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711330 | RF multi-feed structure to improve plasma uniformity | — | 2017-07-18 |
| 9696097 | Multi-substrate thermal management apparatus | Kim Vellore, Andrew J. Constant, Jacob Newman, Jeffrey Blahnik, Jason M. Schaller +3 more | 2017-07-04 |
| 9653267 | Temperature controlled chamber liner | James D. Carducci, Nipun Misra, Larry D. Elizaga | 2017-05-16 |
| 9570275 | Heated showerhead assembly | James D. Carducci, Olga Regelman, Douglas A. Buchberger, Jr., Paul Brillhart | 2017-02-14 |