Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824862 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2017-11-21 |
| 9721760 | Electron beam plasma source with reduced metal contamination | Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Kartik Ramaswamy, Gonzalo Monroy +2 more | 2017-08-01 |
| 9653267 | Temperature controlled chamber liner | James D. Carducci, Kallol Bera, Larry D. Elizaga | 2017-05-16 |