Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812325 | Method for modifying spacer profile | Akiteru Ko | 2017-11-07 |
| 9786503 | Method for increasing pattern density in self-aligned patterning schemes without using hard masks | Angelique Raley, Akiteru Ko | 2017-10-10 |
| 9748110 | Method and system for selective spacer etch for multi-patterning schemes | Subhadeep Kal, Angelique Raley, Aelan Mosden | 2017-08-29 |