Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812325 | Method for modifying spacer profile | Nihar Mohanty | 2017-11-07 |
| 9786503 | Method for increasing pattern density in self-aligned patterning schemes without using hard masks | Angelique Raley, Nihar Mohanty | 2017-10-10 |
| 9697990 | Etching method for a structure pattern layer having a first material and second material | Satoru Nakamura | 2017-07-04 |
| 9673059 | Method for increasing pattern density in self-aligned patterning integration schemes | Angelique Raley | 2017-06-06 |
| 9576812 | Partial etch memorization via flash addition | Elliott Franke, Vinayak Rastogi, Kiyohito Ito | 2017-02-21 |
| 9570313 | Method for etching high-K dielectric using pulsed bias power | Alok Ranjan | 2017-02-14 |