Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666447 | Method for selectivity enhancement during dry plasma etching | Alok Ranjan | 2017-05-30 |
| 9607843 | Method for roughness improvement and selectivity enhancement during arc layer etch via adjustment of carbon-fluorine content | Alok Ranjan | 2017-03-28 |
| 9576812 | Partial etch memorization via flash addition | Elliott Franke, Akiteru Ko, Kiyohito Ito | 2017-02-21 |
| 9576816 | Method for roughness improvement and selectivity enhancement during arc layer etch using hydrogen | Alok Ranjan | 2017-02-21 |