Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779952 | Method for laterally trimming a hardmask | Sergey Voronin | 2017-10-03 |
| 9768033 | Methods for high precision etching of substrates | Mingmei Wang, Peter L. G. Ventzek | 2017-09-19 |
| 9666447 | Method for selectivity enhancement during dry plasma etching | Vinayak Rastogi | 2017-05-30 |
| 9607843 | Method for roughness improvement and selectivity enhancement during arc layer etch via adjustment of carbon-fluorine content | Vinayak Rastogi | 2017-03-28 |
| 9576816 | Method for roughness improvement and selectivity enhancement during arc layer etch using hydrogen | Vinayak Rastogi | 2017-02-21 |
| 9570313 | Method for etching high-K dielectric using pulsed bias power | Akiteru Ko | 2017-02-14 |