Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793095 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihiko Iwao, Toshihisa Nozawa +1 more | 2017-10-17 |
| 9768033 | Methods for high precision etching of substrates | Alok Ranjan, Mingmei Wang | 2017-09-19 |
| 9728416 | Plasma tuning rods in microwave resonator plasma sources | Jianping Zhao, Lee Chen, Merritt Funk, Iwao Toshihiko | 2017-08-08 |