Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852893 | Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus | Demetre J. Economou, Jianping Zhao, Merritt Funk | 2017-12-26 |
| 9799494 | Energetic negative ion impact ionization plasma | Merritt Funk | 2017-10-24 |
| 9793095 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more | 2017-10-17 |
| 9728416 | Plasma tuning rods in microwave resonator plasma sources | Jianping Zhao, Merritt Funk, Iwao Toshihiko, Peter L. G. Ventzek | 2017-08-08 |
| 9697993 | Non-ambipolar plasma ehncanced DC/VHF phasor | Zhiying Chen | 2017-07-04 |
| 9668332 | Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma | Merritt Funk, Zhiying Chen | 2017-05-30 |