MF

Merritt Funk

TL Tokyo Electron Limited: 5 patents #21 of 744Top 3%
US University Of Houston System: 1 patents #11 of 87Top 15%
🗺 Texas: #710 of 15,389 inventorsTop 5%
Overall (2017): #27,963 of 506,227Top 6%
5
Patents 2017

Issued Patents 2017

Showing 1–5 of 5 patents

Patent #TitleCo-InventorsDate
9852893 Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus Lee Chen, Demetre J. Economou, Jianping Zhao 2017-12-26
9799494 Energetic negative ion impact ionization plasma Lee Chen 2017-10-24
9793095 Microwave surface-wave plasma device Jianping Zhao, Lee Chen, Toshihiko Iwao, Toshihisa Nozawa, Zhiying Chen +1 more 2017-10-17
9728416 Plasma tuning rods in microwave resonator plasma sources Jianping Zhao, Lee Chen, Iwao Toshihiko, Peter L. G. Ventzek 2017-08-08
9668332 Method and apparatus for providing an anisotropic and mono-energetic neutral beam by non-ambipolar electron plasma Lee Chen, Zhiying Chen 2017-05-30