Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793095 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihiko Iwao, Zhiying Chen +1 more | 2017-10-17 |
| 9767994 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Tetsuya Goto, Takaaki Matsuoka, Atsutoshi Inokuchi +1 more | 2017-09-19 |
| 9631274 | Plasma processing apparatus | Shinji Komoto, Masahide Iwasaki | 2017-04-25 |
| 9574267 | Plasma processing apparatus | Shinji Komoto, Masahide Iwasaki | 2017-02-21 |