Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812302 | Magnetron sputtering apparatus | Tadahiro Ohmi, Tetsuya Goto | 2017-11-07 |
| 9767994 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Tetsuya Goto, Toshihisa Nozawa, Atsutoshi Inokuchi +1 more | 2017-09-19 |