Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831067 | Film-forming apparatus | Toshihiko Iwao, Koji Yamagishi, Satoshi Yonekura | 2017-11-28 |
| 9691591 | Plasma processing apparatus | — | 2017-06-27 |
| 9631274 | Plasma processing apparatus | Toshihisa Nozawa, Shinji Komoto | 2017-04-25 |
| 9574267 | Plasma processing apparatus | Toshihisa Nozawa, Shinji Komoto | 2017-02-21 |