Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831067 | Film-forming apparatus | Masahide Iwasaki, Koji Yamagishi, Satoshi Yonekura | 2017-11-28 |
| 9793095 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihisa Nozawa, Zhiying Chen +1 more | 2017-10-17 |
| 9633821 | Microwave plasma processing apparatus and microwave supplying method | Kazushi Kaneko, Satoru Kawakami | 2017-04-25 |