Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633821 | Microwave plasma processing apparatus and microwave supplying method | Toshihiko Iwao, Satoru Kawakami | 2017-04-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633821 | Microwave plasma processing apparatus and microwave supplying method | Toshihiko Iwao, Satoru Kawakami | 2017-04-25 |