IT

Iwao Toshihiko

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
Overall (2017): #391,593 of 506,227Top 80%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9728416 Plasma tuning rods in microwave resonator plasma sources Jianping Zhao, Lee Chen, Merritt Funk, Peter L. G. Ventzek 2017-08-08