Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728416 | Plasma tuning rods in microwave resonator plasma sources | Jianping Zhao, Lee Chen, Merritt Funk, Peter L. G. Ventzek | 2017-08-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728416 | Plasma tuning rods in microwave resonator plasma sources | Jianping Zhao, Lee Chen, Merritt Funk, Peter L. G. Ventzek | 2017-08-08 |