Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824862 | Symmetric VHF source for a plasma reactor | Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins, Shahid Rauf +3 more | 2017-11-21 |
| 9799491 | Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching | Leonid Dorf, Kenneth S. Collins, Shahid Rauf, James D. Carducci, Hamid Tavassoli +2 more | 2017-10-24 |
| 9745663 | Symmetrical inductively coupled plasma source with symmetrical flow chamber | Andrew Nguyen, Kenneth S. Collins, Shahid Rauf, James D. Carducci, Douglas A. Buchberger, Jr. +5 more | 2017-08-29 |
| 9741546 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more | 2017-08-22 |
| 9721760 | Electron beam plasma source with reduced metal contamination | Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Nipun Misra, Gonzalo Monroy +2 more | 2017-08-01 |
| 9659751 | System and method for selective coil excitation in inductively coupled plasma processing reactors | Yang Yang, Steven Lane, Lawrence Wong, Joseph AuBuchon, Travis Koh | 2017-05-23 |
| 9639097 | Component temperature control by coolant flow control and heater duty cycle control | Chetan Mahadeswaraswamy, Bryan Liao, Sergio Fukuda Shoji, Duy D. Nguyen, Hamid Noorbakhsh +1 more | 2017-05-02 |
| 9613783 | Method and apparatus for controlling a magnetic field in a plasma chamber | Steven Lane, Tza-Jing Gung, Travis Koh, Joseph AuBuchon, Yang Yang | 2017-04-04 |
| 9564297 | Electron beam plasma source with remote radical source | Ming-Feng Wu, Leonid Dorf, Shahid Rauf, Ying Zhang, Kenneth S. Collins +2 more | 2017-02-07 |