Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721760 | Electron beam plasma source with reduced metal contamination | Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Kartik Ramaswamy, Nipun Misra +2 more | 2017-08-01 |
| 9659751 | System and method for selective coil excitation in inductively coupled plasma processing reactors | Kartik Ramaswamy, Yang Yang, Lawrence Wong, Joseph AuBuchon, Travis Koh | 2017-05-23 |
| 9613783 | Method and apparatus for controlling a magnetic field in a plasma chamber | Tza-Jing Gung, Kartik Ramaswamy, Travis Koh, Joseph AuBuchon, Yang Yang | 2017-04-04 |
| 9564297 | Electron beam plasma source with remote radical source | Ming-Feng Wu, Leonid Dorf, Shahid Rauf, Ying Zhang, Kenneth S. Collins +2 more | 2017-02-07 |