Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779953 | Electromagnetic dipole for plasma density tuning in a substrate processing chamber | Tza-Jing Gung, Samer Banna | 2017-10-03 |
| 9659751 | System and method for selective coil excitation in inductively coupled plasma processing reactors | Kartik Ramaswamy, Yang Yang, Steven Lane, Lawrence Wong, Travis Koh | 2017-05-23 |
| 9613783 | Method and apparatus for controlling a magnetic field in a plasma chamber | Steven Lane, Tza-Jing Gung, Kartik Ramaswamy, Travis Koh, Yang Yang | 2017-04-04 |