Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779953 | Electromagnetic dipole for plasma density tuning in a substrate processing chamber | Joseph AuBuchon, Tza-Jing Gung | 2017-10-03 |
| 9659803 | Electrostatic chuck with concentric cooling base | Dmitry Lubomirsky, Kyle Tantiwong | 2017-05-23 |
| 9646893 | Method and apparatus for reducing radiation induced change in semiconductor structures | Gary E. Dickerson, Seng (victor) Keong Lim, Gregory L. Kirk, Mehdi Vaez-Iravani | 2017-05-09 |
| 9536710 | Tunable gas delivery assembly with internal diffuser and angular injection | Vladimir Knyazik, Kyle Tantiwong, Waheb Bishara | 2017-01-03 |