Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9679372 | Apparatus and methods for inspecting extreme ultra violet reticles | Mehran Nasser-Ghodsi, Stanley Stokowski | 2017-06-13 |
| 9646893 | Method and apparatus for reducing radiation induced change in semiconductor structures | Gary E. Dickerson, Seng (victor) Keong Lim, Samer Banna, Gregory L. Kirk | 2017-05-09 |
| 9568435 | Simultaneous multi-spot inspection and imaging | Lawrence R. Miller | 2017-02-14 |