Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9679372 | Apparatus and methods for inspecting extreme ultra violet reticles | Mehran Nasser-Ghodsi, Mehdi Vaez-Iravani | 2017-06-13 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Guoheng Zhao +5 more | 2017-05-09 |
| 9619878 | Inspecting high-resolution photolithography masks | Fred E. Stanke, Ilya Toytman, David Alles, Gregg Anthony Inderhees, Stanley E. Mehdi Vaez-Iravani | 2017-04-11 |