Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant Aji, Stanley Stokowski, Guoheng Zhao +5 more | 2017-05-09 |