Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9678350 | Laser with integrated multi line or scanning beam capability | Christian Wolters, Jijen Vazhaeparambil, Dirk Woll, Anatoly Romanovsky, Bret Whiteside +1 more | 2017-06-13 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Stanley Stokowski +5 more | 2017-05-09 |
| 9553034 | Combined semiconductor metrology system | Scott A. Young, Nanchang Zhu, Neeraj Khanna | 2017-01-24 |