Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772297 | Apparatus and methods for combined brightfield, darkfield, and photothermal inspection | Mohan Mahadevan, Alex Salnik, Scott A. Young | 2017-09-26 |
| 9747520 | Systems and methods for enhancing inspection sensitivity of an inspection tool | Shifang Li, Youxian Wen, Sven Schwitalla, Prashant Aji | 2017-08-29 |
| 9709386 | Apparatus and methods for measuring properties in a TSV structure using beam profile reflectometry | Timothy Goodwin, Raul V. Tan, Shifang Li | 2017-07-18 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Stanley Stokowski, Guoheng Zhao +5 more | 2017-05-09 |
| 9640449 | Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy | Timothy Goodwin, Mohan Mahadevan, Paul Horn, Shifang Li | 2017-05-02 |