Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9747520 | Systems and methods for enhancing inspection sensitivity of an inspection tool | Shifang Li, Sven Schwitalla, Prashant Aji, Lena Nicolaides | 2017-08-29 |
| 9658150 | System and method for semiconductor wafer inspection and metrology | Shifang Li | 2017-05-23 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Stanley Stokowski +5 more | 2017-05-09 |