Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9752992 | Variable image field curvature for object inspection | — | 2017-09-05 |
| 9719943 | Wafer edge inspection with trajectory following edge profile | — | 2017-08-01 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Stanley Stokowski +5 more | 2017-05-09 |
| 9640449 | Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy | Timothy Goodwin, Lena Nicolaides, Mohan Mahadevan, Shifang Li | 2017-05-02 |