| 9772297 |
Apparatus and methods for combined brightfield, darkfield, and photothermal inspection |
Lena Nicolaides, Alex Salnik, Scott A. Young |
2017-09-26 |
| 9734568 |
Automated inline inspection and metrology using shadow-gram images |
Himanshu Vajaria, Sina Jahanbin, Bradley Ries |
2017-08-15 |
| 9645097 |
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning |
Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Stanley Stokowski +5 more |
2017-05-09 |
| 9640449 |
Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy |
Timothy Goodwin, Lena Nicolaides, Paul Horn, Shifang Li |
2017-05-02 |
| 9569834 |
Automated image-based process monitoring and control |
Himanshu Vajaria, Shabnam Ghadar, Tommaso Torelli, Bradley Ries, Stilian Ivanov Pandev |
2017-02-14 |