Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816810 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Noam Sapiens | 2017-11-14 |
| 9784690 | Apparatus, techniques, and target designs for measuring semiconductor parameters | Noam Sapiens, Andrei V. Shchegrov | 2017-10-10 |
| 9721055 | Measurement model optimization based on parameter variations across a wafer | — | 2017-08-01 |
| 9710728 | Image based signal response metrology | Siddharth Srivastava | 2017-07-18 |
| 9569834 | Automated image-based process monitoring and control | Himanshu Vajaria, Shabnam Ghadar, Tommaso Torelli, Bradley Ries, Mohan Mahadevan | 2017-02-14 |