Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816810 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Noam Sapiens, Stilian Ivanov Pandev | 2017-11-14 |
| 9778213 | Metrology tool with combined XRF and SAXS capabilities | Michael S. Bakeman, Andrei V. Shchegrov, Kevin Peterlinz | 2017-10-03 |
| 9535018 | Combined x-ray and optical metrology | Kevin Peterlinz, Andrei V. Shchegrov, Michael S. Bakeman | 2017-01-03 |