Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816810 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Thaddeus Gerard Dziura, Noam Sapiens, Stilian Ivanov Pandev | 2017-11-14 |
| 9778213 | Metrology tool with combined XRF and SAXS capabilities | Michael S. Bakeman, Andrei V. Shchegrov, Thaddeus Gerard Dziura | 2017-10-03 |
| 9574992 | Single wavelength ellipsometry with improved spot size capability | Esen Salcin, Fuming Wang, Hidong Kwak, Damon F. Kvamme, Uri Greenberg +1 more | 2017-02-21 |
| 9535018 | Combined x-ray and optical metrology | Andrei V. Shchegrov, Michael S. Bakeman, Thaddeus Gerard Dziura | 2017-01-03 |