Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9625810 | Source multiplexing illumination for mask inspection | Daimian Wang, Daniel Wack, Tao-Yi Fu | 2017-04-18 |
| 9574992 | Single wavelength ellipsometry with improved spot size capability | Esen Salcin, Fuming Wang, Kevin Peterlinz, Hidong Kwak, Uri Greenberg +1 more | 2017-02-21 |