Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9759912 | Particle and chemical control using tunnel flow | Frank Chilese, Gildardo Delgado, John R. Torczynski, Leonard E. Klebanoff | 2017-09-12 |
| 9625810 | Source multiplexing illumination for mask inspection | Daimian Wang, Damon F. Kvamme, Tao-Yi Fu | 2017-04-18 |
| 9544984 | System and method for generation of extreme ultraviolet light | Alexander N. Bykanov, Oleg Khodykin, Konstantin Tsigutkin, Layton Hale, Joseph F. Walsh +3 more | 2017-01-10 |