Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842724 | Method and system for imaging of a photomask through a pellicle | William G. Schultz, Garry Rose | 2017-12-12 |
| 9818887 | Back-illuminated sensor with boron layer | Jehn-Huar Chern, Ali R. Ehsani, David L. Brown, Yung-Ho Alex Chuang, John Fielden | 2017-11-14 |
| 9810991 | System and method for cleaning EUV optical elements | Frank Chilese, Rudy F. Garcia | 2017-11-07 |
| 9759912 | Particle and chemical control using tunnel flow | Frank Chilese, Daniel Wack, John R. Torczynski, Leonard E. Klebanoff | 2017-09-12 |
| 9721761 | Open plasma lamp for forming a light-sustained plasma | Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine | 2017-08-01 |
| 9662688 | Apparatus and method for cross-flow purge for optical components in a chamber | Garry Rose, H. Steven Larson, Daniel R. Hennigan | 2017-05-30 |
| 9573111 | High purity ozone generator for optics cleaning and recovery | Garry Rose, H. Steven Larson | 2017-02-21 |