Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9662688 | Apparatus and method for cross-flow purge for optical components in a chamber | Garry Rose, Gildardo Delgado, Daniel R. Hennigan | 2017-05-30 |
| 9573111 | High purity ozone generator for optics cleaning and recovery | Garry Rose, Gildardo Delgado | 2017-02-21 |