Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842724 | Method and system for imaging of a photomask through a pellicle | William G. Schultz, Gildardo Delgado | 2017-12-12 |
| 9662688 | Apparatus and method for cross-flow purge for optical components in a chamber | Gildardo Delgado, H. Steven Larson, Daniel R. Hennigan | 2017-05-30 |
| 9573111 | High purity ozone generator for optics cleaning and recovery | Gildardo Delgado, H. Steven Larson | 2017-02-21 |