Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9662688 | Apparatus and method for cross-flow purge for optical components in a chamber | Garry Rose, Gildardo Delgado, H. Steven Larson | 2017-05-30 |
| 9574992 | Single wavelength ellipsometry with improved spot size capability | Esen Salcin, Fuming Wang, Kevin Peterlinz, Hidong Kwak, Damon F. Kvamme +1 more | 2017-02-21 |