Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9713239 | Laser produced plasma EUV light source | Bjorn Hansson, Igor V. Fomenkov, David C. Brandt | 2017-07-18 |
| 9544984 | System and method for generation of extreme ultraviolet light | Oleg Khodykin, Daniel Wack, Konstantin Tsigutkin, Layton Hale, Joseph F. Walsh +3 more | 2017-01-10 |