Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9713239 | Laser produced plasma EUV light source | Alexander N. Bykanov, Igor V. Fomenkov, David C. Brandt | 2017-07-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9713239 | Laser produced plasma EUV light source | Alexander N. Bykanov, Igor V. Fomenkov, David C. Brandt | 2017-07-18 |