Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9713239 | Laser produced plasma EUV light source | Bjorn Hansson, Alexander N. Bykanov, Igor V. Fomenkov | 2017-07-18 |
| 9541840 | Faceted EUV optical element | Alexander I. Ershov, Igor V. Fomenkov | 2017-01-10 |