Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9844804 | Light collector mirror carrier | Silvia De Dea, Michael Varga, Robert L. Morse | 2017-12-19 |
| 9795023 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | David Robert Evans, Matthew R. Graham | 2017-10-17 |
| 9735535 | Drive laser for EUV light source | Jerzy Hoffman, Norbert Bowering, Igor V. Fomenkov | 2017-08-15 |
| 9693440 | EUV LPP source with improved dose control by tracking dose over specified window | — | 2017-06-27 |
| 9560730 | Transport system for an extreme ultraviolet light source | Silvia De Dea, Brandon Wilson Verhoff, Gregory J. Wilson, Bruno La Fontaine | 2017-01-31 |
| 9557650 | Transport system for an extreme ultraviolet light source | Silvia De Dea, Brandon Wilson Verhoff, Gregory J. Wilson, Bruno La Fontaine | 2017-01-31 |
| 9539622 | Apparatus for and method of active cleaning of EUV optic with RF plasma field | — | 2017-01-10 |
| 9541840 | Faceted EUV optical element | David C. Brandt, Igor V. Fomenkov | 2017-01-10 |
| 9541838 | Method of temperature compensation in high power focusing system for EUV LPP source | — | 2017-01-10 |